Evaluation of buried interfaces using HAXPES with synchrotron radiation.
The detection depth increases, allowing for the evaluation of deeper areas!
We would like to introduce our evaluation of buried interfaces using "Hard X-ray Photoelectron Spectroscopy (HAXPES) with Synchrotron Radiation." X-ray Photoelectron Spectroscopy (XPS) allows for the analysis of surface composition and state, making it an essential technique for surface analysis. While laboratory-type XPS (Al Kα: 1.5 keV) is limited to evaluating extreme surfaces of about 3 nm, using external facilities for Hard X-ray Photoelectron Spectroscopy (HAXPES) at 8 keV enables the evaluation of deeper regions, such as buried interfaces in multilayer structures and stack structures close to actual devices. 【Features】 ■ Greater detection depth compared to conventional XPS ■ Measurement of photoelectrons from deeper energy levels ■ Easier state analysis due to the absence of overlaps with simultaneously generated Auger electrons ■ Utilization of third-generation synchrotron facilities (SPring-8) as a high-brightness X-ray source *For more details, please download the PDF or feel free to contact us.
- Company：東芝ナノアナリシス
- Price：Other
